TCP 9400、9600
TCP series devices are Lam ICP-based single cavity type etching equipment, etching line width ≥0.3 micrometers;
Mainly used for etching silicon oxide, silicon nitride, polycrystalline silicon, silicon and metal materials on wafers of 8 inches and below.
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Product Features
1. Optional Envision operating system, providing more convenient operation, stronger data recording and communication.
2. Upgradable transmission and cavity kit, matching the transmission and supporting processes of transparent and thin films.
3. Customizable electrostatic adsorption to meet ultra-thin wafer etching requirements.
4. Customizable 8-way MFC, compatible with various etching processes for research and development.
5. Provide various new process development and solutions.
